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10.1063/1.5138953
2020-06-15
Free-standing silicon shadow masks for transmon qubit fabrication
aip.org
© 2020 Author(s)
10.1063/1.5138953
https://doi.org/10.1063/1.5138953
VoR
doi:10.1063/1.5138953
AIP Advances
application/pdf
AIP Publishing, LLC
Free-standing silicon shadow masks for transmon qubit fabrication
I. Tsioutsios
K. Serniak
S. Diamond
V. V. Sivak
Z. Wang
S. Shankar
L. Frunzio
R. J. Schoelkopf
M. H. Devoret
AIP Advances 2020.10:065120
2020-06-15
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10.1063/1.5138953
aip.org
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